祁建海 1,2,*陈洋 1,2岳圆圆 3吕炳辰 1,2[ ... ]黎大兵 1,2
作者单位
摘要
1 中国科学院长春光学精密机械与物理研究所, 发光及应用国家重点实验室, 长春 130033
2 中国科学院大学, 材料科学与光电工程中心, 北京 100049
3 吉林财经大学管理科学与信息工程学院, 长春 130117
二维(2D)石墨烯具有原子层厚度, 在电子器件中展示出突破摩尔定律限制的巨大潜力。目前, 化学气相沉积(CVD)是一种广泛应用于石墨烯生长的方法, 满足低成本、大面积生产和易于控制层数的需求。然而, 由于催化金属(例如Cu)衬底一般为多晶特性, 导致CVD法生长的石墨烯晶体质量相对较差。为此, 通过高温退火工艺制备了Cu (111)单晶衬底, 使石墨烯的初始成核过程得到了很好的控制, 从而实现了厘米尺寸的高质量单晶石墨烯的制备。根据二者的晶格匹配关系, Cu (111)衬底为石墨烯生长提供了唯一的成核取向, 相邻石墨烯成核岛的边界能够缝合到一起。单晶石墨烯具有高电导率, 相较于原始多晶Cu上生长的石墨烯(1 415.7 Ω·sq-1), 其平均薄层电阻低至607.5 Ω·sq-1。高温退火能够清洁铜箔, 从而获得表面粗糙度较低的洁净石墨烯。将石墨烯用于场效应晶体管(FET), 器件的最大开关比为145.5, 载流子迁移率为2.31×103 cm2·V-1·s-1。基于以上结果, 相信本工作中的单晶石墨烯还满足其他高性能电子器件的制备。
石墨烯 高温退火 化学气相沉积 场效应晶体管 Cu (111) Cu (111) graphene high-temperature annealing chemical vapor deposition field-effect transistor 
人工晶体学报
2023, 52(11): 1980
Long Guo 1,2Ke Jiang 1,2,4,*Xiaojuan Sun 1,2Zihui Zhang 1,3[ ... ]Dabing Li 1,2,5,*
Author Affiliations
Abstract
1 State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
3 Key Laboratory of Electronic Materials and Devices of Tianjin, School of Electronics and Information Engineering, Hebei University of Technology, Tianjin 300401, China
4 e-mail: jiangke@ciomp.ac.cn
5 e-mail: lidb@ciomp.ac.cn
AlGaN solar-blind ultraviolet (SBUV) detectors have potential application in fire monitoring, corona discharge monitoring, or biological imaging. With the promotion of application requirements, there is an urgent demand for developing a high-performance vertical detector that can work at low bias or even zero bias. In this work, we have introduced a photoconductive gain mechanism into a vertical AlGaN SBUV detector and successfully realized it in a p-i-n photodiode via inserting a multiple-quantum-well (MQW) into the depletion region. The MQW plays the role of trapping holes and increasing carrier lifetime due to its strong hole confinement effect and quantum confinement Stark effect. Hence, the electrons can go through the detector multiple times, inducing unipolar carrier transport multiplication. Experimentally, an AlGaN SBUV detector with a zero-bias peak responsivity of about 0.425 A/W at 233 nm is achieved, corresponding to an external quantum efficiency of 226%, indicating the existence of internal current gain. When compared with the device without MQW structure, the gain is estimated to be about 103 in magnitude. The investigation provides an alternative and effective approach to obtain high current gain in vertical AlGaN SBUV detectors at zero bias.
Photonics Research
2021, 9(10): 10001907
Ke Jiang 1,2Xiaojuan Sun 1,2,6,*Zi-Hui Zhang 1,3Jianwei Ben 1,2,5[ ... ]Dabing Li 1,2,7,*
Author Affiliations
Abstract
1 State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
3 Key Laboratory of Electronic Materials and Devices of Tianjin, School of Electronics and Information Engineering, Hebei University of Technology, Tianjin 300401, China
4 Key Laboratory of Advanced Structural Materials, Ministry of Education, Changchun University of Technology, Changchun 130012, China
5 Current Address: College of Materials Science and Engineering, Shenzhen University, Shenzhen 518071, China
6 e-mail: sunxj@ciomp.ac.cn
7 e-mail: lidb@ciomp.ac.cn
AlGaN solar-blind ultraviolet detectors have great potential in many fields, although their performance has not fully meet the requirements until now. Here, we proposed an approach to utilize the inherent polarization effect of AlGaN to improve the detector performance. AlGaN heterostructures were designed to enhance the polarization field in the absorption layer, and a high built-in field and a high electron mobility conduction channel were formed. As a result, a high-performance solar-blind ultraviolet detector with a peak responsivity of 1.42 A/W at 10 V was achieved, being 50 times higher than that of the nonpolarization-enhanced one. Moreover, an electron reservoir structure was proposed to further improve the performance. A higher peak responsivity of 3.1 A/W at 30 V was achieved because the electron reservoir structure could modulate the electron concentration in the conduction channel. The investigation presented here provided feasible approaches to improve the performance of the AlGaN detector by taking advantage of its inherent property.
Photonics Research
2020, 8(7): 07001243
You Wu 1,2Zhiwen Li 1,2Kah-Wee Ang 3Yuping Jia 1,2[ ... ]Dabing Li 1,2,7,*
Author Affiliations
Abstract
1 State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
3 Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117583, Singapore
4 Shenzhen Castle Security Technology Co., Ltd., Shenzhen 518000, China
5 State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
6 e-mail: liuxinke@ciomp.ac.cn
7 e-mail: lidb@ciomp.ac.cn
With the increasing demand for high integration and multi-color photodetection for both military and civilian applications, the research of multi-wavelength detectors has become a new research hotspot. However, current research has been mainly in visible dual- or multi-wavelength detectors, while integration of both visible light and ultraviolet (UV) dual-wavelength detectors has rarely been studied. In this work, large-scale and high-quality monolayer MoS2 was grown by the chemical vapor deposition method on transparent free-standing GaN substrate. Monolithic integration of MoS2-based visible detectors and GaN-based UV detectors was demonstrated using common semiconductor fabrication technologies such as photolithography, argon plasma etching, and metal deposition. High performance of a 280 nm and 405 nm dual-wavelength photodetector was realized. The responsivity of the UV detector reached 172.12 A/W, while that of the visible detector reached 17.5 A/W. Meanwhile, both photodetectors achieved high photocurrent gain, high external quantum efficiency, high normalized detection rate, and low noise equivalent power. Our study extends the future application of dual-wavelength detectors for image sensing and optical communication.
Photonics Research
2019, 7(10): 10001127

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